Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications
10.1109/MEMS51782.2021.9375151
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
IEEE
2022
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| Subjects: | |
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/215037 |
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| Institution: | National University of Singapore |