Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications

• Main Authors: Liu, W, Ma, Y, Chang, Y, Dong, B, Wei, J, Ren, Z, Lee, C
• Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: IEEE 2022
• Subjects: mid-infrared; suspended Si waveguide; subwavelength grating; chemical sensor; photonic platform
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/215037
• Institution: National University of Singapore

10.1109/MEMS51782.2021.9375151