Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications

Subwavelength-Engineered Suspended Silicon Waveguide for Long-Wave Infrared Sensing Applications

10.1109/MEMS51782.2021.9375151

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Bibliographic Details
Main Authors: Liu, W, Ma, Y, Chang, Y, Dong, B, Wei, J, Ren, Z, Lee, C
Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: IEEE 2022
Subjects:
mid-infrared
suspended Si waveguide
subwavelength grating
chemical sensor
photonic platform
Online Access:https://scholarbank.nus.edu.sg/handle/10635/215037
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Institution: National University of Singapore

Internet

https://scholarbank.nus.edu.sg/handle/10635/215037

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