Transfer learning-based artificial intelligence-integrated physical modeling to enable failure analysis for 3 nanometer and smaller silicon-based CMOS transistors

• Main Authors: JIEMING PAN, LOW KAIN LU, JOYDEEP GHOSH, Senthilnath Jayavelu, Md Meftahul Ferdaus, Shang Yi Lim, Evgeny Zamburg, Li Yida, TANG BAOSHAN, WANG XINGHUA, LEONG JIN FENG, Savitha Ramasamy, Tonio Buonassisi, Tham Chen Khong, THEAN VOON YEW, AARON
• Other Authors: COLLEGE OF DESIGN AND ENGINEERING
• Format: Article
• Language: English
• Published: ACS Applied Nano Materials 2022
• Subjects: failure analysis transistor bridge defect CMOS FinFET GAAFET technology computer-aided design (TCAD) machine learning transfer learning
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/218176
• Institution: National University of Singapore

10.1021/acsanm.1c00960