TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS

TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS

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Bibliographic Details
Main Author: DIONALDO ZUDHISTIRA
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2022
Subjects:
lamella conversion, site-specific pillar sample, tomography
Online Access:https://scholarbank.nus.edu.sg/handle/10635/229996
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Institution: National University of Singapore
Language: English

Internet

https://scholarbank.nus.edu.sg/handle/10635/229996

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