TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS

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Bibliographic Details
Main Author:	DIONALDO ZUDHISTIRA
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2022
Subjects:	lamella conversion, site-specific pillar sample, tomography
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/229996
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-229996
record_format	dspace
spelling	sg-nus-scholar.10635-2299962022-08-05T18:00:20Z TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS DIONALDO ZUDHISTIRA MATERIALS SCIENCE AND ENGINEERING Michel Bosman lamella conversion, site-specific pillar sample, tomography Master's MASTER OF ENGINEERING (CDE) 2022-08-05T18:00:19Z 2022-08-05T18:00:19Z 2022-04-25 Thesis DIONALDO ZUDHISTIRA (2022-04-25). TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/229996 0000-0002-2305-5085 en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	lamella conversion, site-specific pillar sample, tomography
spellingShingle	lamella conversion, site-specific pillar sample, tomography DIONALDO ZUDHISTIRA TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
description	Master's
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING DIONALDO ZUDHISTIRA
format	Theses and Dissertations
author	DIONALDO ZUDHISTIRA
author_sort	DIONALDO ZUDHISTIRA
title	TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
title_short	TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
title_full	TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
title_fullStr	TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
title_full_unstemmed	TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS
title_sort	tem sample preparation techniques development for advanced ic including finfets
publishDate	2022
url	https://scholarbank.nus.edu.sg/handle/10635/229996
_version_	1743119409248993280

TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS

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