TEM SAMPLE PREPARATION TECHNIQUES DEVELOPMENT FOR ADVANCED IC INCLUDING FINFETS

Master's

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Bibliographic Details
Main Author:	DIONALDO ZUDHISTIRA
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2022
Subjects:	lamella conversion, site-specific pillar sample, tomography
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/229996
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Institution:	National University of Singapore
Language:	English

Description
Summary:	Master's

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