High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation
Thin Solid Films
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2011
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sg-nus-scholar.10635-289602023-08-21T22:52:54Z High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation Li, Q. Ong, C.K. Wang, S.J. Huan, A.C.H. Ng, T.H. Chim, W.K. SINGAPORE-MIT ALLIANCE BIOCHEMISTRY ELECTRICAL & COMPUTER ENGINEERING PHYSICS High-k dielectric thin films Interface Metal-insulator-semiconductor structures Pulse laser deposition Thin Solid Films 504 1-2 45-49 THSFA 2011-11-29T06:11:29Z 2011-11-29T06:11:29Z 2006 Conference Paper Li, Q., Ong, C.K., Wang, S.J., Huan, A.C.H., Ng, T.H., Chim, W.K. (2006). High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation. Thin Solid Films 504 (1-2) : 45-49. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/28960 000236486200012 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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High-k dielectric thin films Interface Metal-insulator-semiconductor structures Pulse laser deposition |
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High-k dielectric thin films Interface Metal-insulator-semiconductor structures Pulse laser deposition Li, Q. Ong, C.K. Wang, S.J. Huan, A.C.H. Ng, T.H. Chim, W.K. High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation |
| description |
Thin Solid Films |
| author2 |
SINGAPORE-MIT ALLIANCE |
| author_facet |
SINGAPORE-MIT ALLIANCE Li, Q. Ong, C.K. Wang, S.J. Huan, A.C.H. Ng, T.H. Chim, W.K. |
| format |
Conference or Workshop Item |
| author |
Li, Q. Ong, C.K. Wang, S.J. Huan, A.C.H. Ng, T.H. Chim, W.K. |
| author_sort |
Li, Q. |
| title |
High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation |
| title_short |
High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation |
| title_full |
High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation |
| title_fullStr |
High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation |
| title_full_unstemmed |
High-thermal-stability (HfO2)1-x(Al2O3)xfilm fabricated by dual-beam laser ablation |
| title_sort |
high-thermal-stability (hfo2)1-x(al2o3)xfilm fabricated by dual-beam laser ablation |
| publishDate |
2011 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/28960 |
| _version_ |
1775625568512901120 |