Performance-Based Optical Proximity Correction
Ph.D
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| Format: | Theses and Dissertations |
| Language: | English |
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2011
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/29519 |
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| Institution: | National University of Singapore |
| Language: | English |
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sg-nus-scholar.10635-295192017-10-21T09:18:06Z Performance-Based Optical Proximity Correction TEH SIEW HONG ELECTRICAL & COMPUTER ENGINEERING TAY EE BENG, ARTHUR HENG CHUN HUAT Optical Proximity Correction, lithography, mask design, device performance Ph.D DOCTOR OF PHILOSOPHY 2011-11-30T18:00:21Z 2011-11-30T18:00:21Z 2011-01-20 Thesis TEH SIEW HONG (2011-01-20). Performance-Based Optical Proximity Correction. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/29519 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Optical Proximity Correction, lithography, mask design, device performance |
| spellingShingle |
Optical Proximity Correction, lithography, mask design, device performance TEH SIEW HONG Performance-Based Optical Proximity Correction |
| description |
Ph.D |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING TEH SIEW HONG |
| format |
Theses and Dissertations |
| author |
TEH SIEW HONG |
| author_sort |
TEH SIEW HONG |
| title |
Performance-Based Optical Proximity Correction |
| title_short |
Performance-Based Optical Proximity Correction |
| title_full |
Performance-Based Optical Proximity Correction |
| title_fullStr |
Performance-Based Optical Proximity Correction |
| title_full_unstemmed |
Performance-Based Optical Proximity Correction |
| title_sort |
performance-based optical proximity correction |
| publishDate |
2011 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/29519 |
| _version_ |
1681080864070434816 |