High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications

Ph.D

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Bibliographic Details
Main Author:	PHUNG THANH HOA
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	HfO2, Er2O3, ALD SiO2, MIM Capacitors, Analog-mixed signal, RF
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32464
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-32464
record_format	dspace
spelling	sg-nus-scholar.10635-324642024-10-26T01:29:03Z High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications PHUNG THANH HOA ELECTRICAL & COMPUTER ENGINEERING ZHU CHUNXIANG CHO BYUNG-JIN HfO2, Er2O3, ALD SiO2, MIM Capacitors, Analog-mixed signal, RF Ph.D DOCTOR OF PHILOSOPHY 2012-04-30T18:00:54Z 2012-04-30T18:00:54Z 2011-08-18 Thesis PHUNG THANH HOA (2011-08-18). High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32464 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	HfO2, Er2O3, ALD SiO2, MIM Capacitors, Analog-mixed signal, RF
spellingShingle	HfO2, Er2O3, ALD SiO2, MIM Capacitors, Analog-mixed signal, RF PHUNG THANH HOA High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING PHUNG THANH HOA
format	Theses and Dissertations
author	PHUNG THANH HOA
author_sort	PHUNG THANH HOA
title	High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
title_short	High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
title_full	High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
title_fullStr	High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
title_full_unstemmed	High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications
title_sort	high-k dielectrics in metal insulator metal (mim) capacitors for rf applications
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32464
_version_	1821182975739428864

High-K Dielectrics in Metal Insulator Metal (MIM) Capacitors for RF Applications

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