Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens

US5569920

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Bibliographic Details
Main Authors:	PHANG, J. C. H., CBIM, W. K., CHAN, D. S. H., LIU, Y. Y.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32545
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32545
record_format	dspace
spelling	sg-nus-scholar.10635-325452015-07-29T07:03:38Z Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens PHANG, J. C. H. CBIM, W. K. CHAN, D. S. H. LIU, Y. Y. ELECTRICAL ENGINEERING NATIONAL UNIVERSITY OF SINGAPORE US5569920 Granted Patent 2012-05-02T02:26:48Z 2012-05-02T02:26:48Z 1996-10-29 Patent PHANG, J. C. H.,CBIM, W. K.,CHAN, D. S. H.,LIU, Y. Y. (1996-10-29). Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32545 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US5569920
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING PHANG, J. C. H. CBIM, W. K. CHAN, D. S. H. LIU, Y. Y.
format	Patent
author	PHANG, J. C. H. CBIM, W. K. CHAN, D. S. H. LIU, Y. Y.
spellingShingle	PHANG, J. C. H. CBIM, W. K. CHAN, D. S. H. LIU, Y. Y. Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
author_sort	PHANG, J. C. H.
title	Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
title_short	Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
title_full	Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
title_fullStr	Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
title_full_unstemmed	Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
title_sort	retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32545
_version_	1681081243163164672

Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens

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