Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens

• Main Authors: PHANG, J. C. H., CBIM, W. K., CHAN, D. S. H., LIU, Y. Y.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Patent
• Published: 2012
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/32545
• Institution: National University of Singapore

US5569920