Retractable cathodoluminescence detector with high ellipticity and high backscattered electron rejection performance for large area specimens
US5569920
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Main Authors: | PHANG, J. C. H., CBIM, W. K., CHAN, D. S. H., LIU, Y. Y. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Patent |
Published: |
2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32545 |
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Institution: | National University of Singapore |
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