Method to form shallow junction transistors while eliminating shorts due to junction spiking

Method to form shallow junction transistors while eliminating shorts due to junction spiking

US6297109

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Bibliographic Details
Main Authors: CHAN, LAP, CHA, CHER LIANG, SUNDARESAN, RAVISHANKAR
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32601
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Institution: National University of Singapore
id sg-nus-scholar.10635-32601
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spelling sg-nus-scholar.10635-326012015-07-29T07:03:43Z Method to form shallow junction transistors while eliminating shorts due to junction spiking CHAN, LAP CHA, CHER LIANG SUNDARESAN, RAVISHANKAR ELECTRICAL & COMPUTER ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6297109 Granted Patent 2012-05-02T02:27:38Z 2012-05-02T02:27:38Z 2001-10-02 Patent CHAN, LAP,CHA, CHER LIANG,SUNDARESAN, RAVISHANKAR (2001-10-02). Method to form shallow junction transistors while eliminating shorts due to junction spiking. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32601 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US6297109
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
CHAN, LAP
CHA, CHER LIANG
SUNDARESAN, RAVISHANKAR
format Patent
author CHAN, LAP
CHA, CHER LIANG
SUNDARESAN, RAVISHANKAR
spellingShingle CHAN, LAP
CHA, CHER LIANG
SUNDARESAN, RAVISHANKAR
Method to form shallow junction transistors while eliminating shorts due to junction spiking
author_sort CHAN, LAP
title Method to form shallow junction transistors while eliminating shorts due to junction spiking
title_short Method to form shallow junction transistors while eliminating shorts due to junction spiking
title_full Method to form shallow junction transistors while eliminating shorts due to junction spiking
title_fullStr Method to form shallow junction transistors while eliminating shorts due to junction spiking
title_full_unstemmed Method to form shallow junction transistors while eliminating shorts due to junction spiking
title_sort method to form shallow junction transistors while eliminating shorts due to junction spiking
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32601
_version_ 1681081253216911360

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