Method for fabricating semiconductor devices with shallow diffusion regions
US8101487
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2012
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32808 |
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sg-nus-scholar.10635-328082015-07-29T07:04:05Z Method for fabricating semiconductor devices with shallow diffusion regions TAN, DEXTER XUEMING COLOMBEAU, BENJAMIN ONG, CLARK KUANG KIAN YEONG, SAI HOOI NG, CHEE MANG PEY, KIN LEONG ELECTRICAL & COMPUTER ENGINEERING PHYSICS CHEMICAL & BIOMOLECULAR ENGINEERING NANYANG TECHNOLOGICAL UNIVERSITY (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE (SINGAPORE, SG) GLOBALFOUNDRIES SINGAPORE PTE. LTD. US8101487 Granted Patent 2012-05-02T02:30:43Z 2012-05-02T02:30:43Z 2012-01-24 Patent TAN, DEXTER XUEMING,COLOMBEAU, BENJAMIN,ONG, CLARK KUANG KIAN,YEONG, SAI HOOI,NG, CHEE MANG,PEY, KIN LEONG (2012-01-24). Method for fabricating semiconductor devices with shallow diffusion regions. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32808 NOT_IN_WOS PatSnap |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
US8101487 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING TAN, DEXTER XUEMING COLOMBEAU, BENJAMIN ONG, CLARK KUANG KIAN YEONG, SAI HOOI NG, CHEE MANG PEY, KIN LEONG |
| format |
Patent |
| author |
TAN, DEXTER XUEMING COLOMBEAU, BENJAMIN ONG, CLARK KUANG KIAN YEONG, SAI HOOI NG, CHEE MANG PEY, KIN LEONG |
| spellingShingle |
TAN, DEXTER XUEMING COLOMBEAU, BENJAMIN ONG, CLARK KUANG KIAN YEONG, SAI HOOI NG, CHEE MANG PEY, KIN LEONG Method for fabricating semiconductor devices with shallow diffusion regions |
| author_sort |
TAN, DEXTER XUEMING |
| title |
Method for fabricating semiconductor devices with shallow diffusion regions |
| title_short |
Method for fabricating semiconductor devices with shallow diffusion regions |
| title_full |
Method for fabricating semiconductor devices with shallow diffusion regions |
| title_fullStr |
Method for fabricating semiconductor devices with shallow diffusion regions |
| title_full_unstemmed |
Method for fabricating semiconductor devices with shallow diffusion regions |
| title_sort |
method for fabricating semiconductor devices with shallow diffusion regions |
| publishDate |
2012 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/32808 |
| _version_ |
1681081290539925504 |