Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications

Ph.D

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Bibliographic Details
Main Author:	LOU LIANG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2013
Subjects:	Silicon nanowire, Piezoresistance, Large strain, Fatigue, Pressure sensor, Flow sensor
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/36323
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-36323
record_format	dspace
spelling	sg-nus-scholar.10635-363232015-01-09T20:49:48Z Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications LOU LIANG ELECTRICAL & COMPUTER ENGINEERING LEE CHENGKUO KWONG DIM-LEE Silicon nanowire, Piezoresistance, Large strain, Fatigue, Pressure sensor, Flow sensor Ph.D DOCTOR OF PHILOSOPHY 2013-02-28T18:00:19Z 2013-02-28T18:00:19Z 2012-08-17 Thesis LOU LIANG (2012-08-17). Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/36323 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Silicon nanowire, Piezoresistance, Large strain, Fatigue, Pressure sensor, Flow sensor
spellingShingle	Silicon nanowire, Piezoresistance, Large strain, Fatigue, Pressure sensor, Flow sensor LOU LIANG Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LOU LIANG
format	Theses and Dissertations
author	LOU LIANG
author_sort	LOU LIANG
title	Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
title_short	Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
title_full	Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
title_fullStr	Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
title_full_unstemmed	Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
title_sort	investigation and integration of piezoresistive silicon nanowires for mems applications
publishDate	2013
url	http://scholarbank.nus.edu.sg/handle/10635/36323
_version_	1681081660244754432

Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications

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