Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer
Master's
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| Language: | English |
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2013
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/36364 |
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sg-nus-scholar.10635-363642024-10-25T12:06:31Z Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer LAU KIA HIAN MECHANICAL ENGINEERING SINHA, SUJEET KUMAR SU-8, Sacrificial layer, MEMS, Microfabrication, Positive photoresist, metallization layer, polymer, lift-off process, surface energy Master's MASTER OF ENGINEERING 2013-02-28T18:02:04Z 2013-02-28T18:02:04Z 2012-08-13 Thesis LAU KIA HIAN (2012-08-13). Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/36364 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
SU-8, Sacrificial layer, MEMS, Microfabrication, Positive photoresist, metallization layer, polymer, lift-off process, surface energy |
| spellingShingle |
SU-8, Sacrificial layer, MEMS, Microfabrication, Positive photoresist, metallization layer, polymer, lift-off process, surface energy LAU KIA HIAN Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer |
| description |
Master's |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING LAU KIA HIAN |
| format |
Theses and Dissertations |
| author |
LAU KIA HIAN |
| author_sort |
LAU KIA HIAN |
| title |
Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer |
| title_short |
Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer |
| title_full |
Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer |
| title_fullStr |
Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer |
| title_full_unstemmed |
Positive Photoresist as a Sacrificial Layer for MEMS Micro-component Fabrication with SU-8 Polymer |
| title_sort |
positive photoresist as a sacrificial layer for mems micro-component fabrication with su-8 polymer |
| publishDate |
2013 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/36364 |
| _version_ |
1821206372046340096 |