DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING
Ph.D
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2013
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/36427 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| Language: | English |
| id |
sg-nus-scholar.10635-36427 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-364272015-09-23T19:45:20Z DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING SARA AZIMI PHYSICS MARK B H BREESE SOW CHORNG HAUR silicon, three-dimensional, free-standing, multilevel, micro- and nano-fabrication, buried channels, porous silicon, electrochemical anodization Ph.D DOCTOR OF PHILOSOPHY 2013-03-12T18:00:17Z 2013-03-12T18:00:17Z 2012-09-28 Thesis SARA AZIMI (2012-09-28). DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/36427 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
silicon, three-dimensional, free-standing, multilevel, micro- and nano-fabrication, buried channels, porous silicon, electrochemical anodization |
| spellingShingle |
silicon, three-dimensional, free-standing, multilevel, micro- and nano-fabrication, buried channels, porous silicon, electrochemical anodization SARA AZIMI DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING |
| description |
Ph.D |
| author2 |
PHYSICS |
| author_facet |
PHYSICS SARA AZIMI |
| format |
Theses and Dissertations |
| author |
SARA AZIMI |
| author_sort |
SARA AZIMI |
| title |
DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING |
| title_short |
DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING |
| title_full |
DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING |
| title_fullStr |
DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING |
| title_full_unstemmed |
DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING |
| title_sort |
development of three dimensional silicon micro- and nano-machining |
| publishDate |
2013 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/36427 |
| _version_ |
1681081671575666688 |