DEVELOPMENT OF THREE DIMENSIONAL SILICON MICRO- AND NANO-MACHINING
Ph.D
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Main Author: | SARA AZIMI |
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Other Authors: | PHYSICS |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/36427 |
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Institution: | National University of Singapore |
Language: | English |
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