Methods for enhancing photolithography patterning

Methods for enhancing photolithography patterning

US8450046

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Bibliographic Details
Main Authors: LING, MOH LUNG, CHUA, GEK SOON, LIN, QUNYING, TAY, CHO JUI, QUAN, CHENGGEN
Other Authors: MECHANICAL ENGINEERING
Format: Patent
Published: 2013
Online Access:http://scholarbank.nus.edu.sg/handle/10635/43443
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Institution: National University of Singapore
id sg-nus-scholar.10635-43443
record_format dspace
spelling sg-nus-scholar.10635-434432015-07-29T07:03:59Z Methods for enhancing photolithography patterning LING, MOH LUNG CHUA, GEK SOON LIN, QUNYING TAY, CHO JUI QUAN, CHENGGEN MECHANICAL ENGINEERING GLOBALFOUNDRIES SINGAPORE PTE. LTD. NATIONAL UNIVERSITY OF SINGAPORE US8450046 Granted Patent 2013-08-12T01:48:10Z 2013-08-12T01:48:10Z 2013-05-28 Patent LING, MOH LUNG,CHUA, GEK SOON,LIN, QUNYING,TAY, CHO JUI,QUAN, CHENGGEN (2013-05-28). Methods for enhancing photolithography patterning. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/43443 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US8450046
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
LING, MOH LUNG
CHUA, GEK SOON
LIN, QUNYING
TAY, CHO JUI
QUAN, CHENGGEN
format Patent
author LING, MOH LUNG
CHUA, GEK SOON
LIN, QUNYING
TAY, CHO JUI
QUAN, CHENGGEN
spellingShingle LING, MOH LUNG
CHUA, GEK SOON
LIN, QUNYING
TAY, CHO JUI
QUAN, CHENGGEN
Methods for enhancing photolithography patterning
author_sort LING, MOH LUNG
title Methods for enhancing photolithography patterning
title_short Methods for enhancing photolithography patterning
title_full Methods for enhancing photolithography patterning
title_fullStr Methods for enhancing photolithography patterning
title_full_unstemmed Methods for enhancing photolithography patterning
title_sort methods for enhancing photolithography patterning
publishDate 2013
url http://scholarbank.nus.edu.sg/handle/10635/43443
_version_ 1681082776765333504

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