Direct removal of SU-8 using focused laser writing

Direct removal of SU-8 using focused laser writing

10.1007/s00339-006-3846-z

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Bibliographic Details
Main Authors: Cheong, F.C., Varghese, B., Sindhu, S., Liu, C.M., Valiyaveettil, S., Bettiol, A.A., Van Kan, J.A., Watt, F., Chin, W.S., Lim, C.T., Sow, C.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51376
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/51376

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