Direct removal of SU-8 using focused laser writing

Direct removal of SU-8 using focused laser writing

10.1007/s00339-006-3846-z

Saved in:

Bibliographic Details
Main Authors:	Cheong, F.C., Varghese, B., Sindhu, S., Liu, C.M., Valiyaveettil, S., Bettiol, A.A., Van Kan, J.A., Watt, F., Chin, W.S., Lim, C.T., Sow, C.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51376
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Similar Items

Multiple-spot optical tweezers created with microlens arrays fabricated by proton beam writing
by: Sow, C.H., et al.
Published: (2014)

Erbium-doped waveguide amplifiers fabricated using focused proton beam writing
by: Liu, K., et al.
Published: (2014)

A progress review of proton beam writing applications in microphotonics
by: Bettiol, A.A., et al.
Published: (2014)

Three-dimensional nanolithography using proton beam writing
by: Van Kan, J.A., et al.
Published: (2014)

Proton beam writing of three-dimensional nanostructures in hydrogen silsesquioxane
by: Van Kan, J.A., et al.
Published: (2014)

Exposure parameters in proton beam writing for hydrogen silsesquioxane
by: van Kan, J.A., et al.
Published: (2014)

Proton beam writing: A platform technology for nano-integration
by: Van Kan, J.A., et al.
Published: (2014)

Hydrogen silsesquioxane a next generation resist for proton beam writing at the 20 nm level
by: van Kan, J.A., et al.
Published: (2014)

Proton beam writing
by: Watt, F., et al.
Published: (2014)

Fabrication of optical waveguides using proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplating
by: Ansari, K., et al.
Published: (2014)

Improvement in proton beam writing at the nano scale
by: Van Kan, J.A., et al.
Published: (2014)

Fabrication of micro-optical components in polymer using proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Proton Beam Writing of Passive Polymer Optical Waveguides
by: Sum, T.C., et al.
Published: (2014)

Optical travelator: Transport and dynamic sorting of colloidal microspheres with an asymmetrical line optical tweezers
by: Cheong, F.C., et al.
Published: (2014)

Fabrication of high aspect ratio 100 nm metallic stamps for nanoimprint lithography using proton beam writing
by: Ansari, K., et al.
Published: (2014)

Proton beam writing: A progress review
by: Van Kan, J.A., et al.
Published: (2014)

Proton beam writing of passive waveguides in PMMA
by: Sum, T.C., et al.
Published: (2014)

Ionscan: Scanning and control software for proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Proton beam writing: A platform technology for nanowire production
by: Van Kan, J.A., et al.
Published: (2014)

Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality
by: Van Kan, J.A., et al.
Published: (2014)

Embedded photonic structures fabricated in photosensitive glass using proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Size selective assembly of colloidal particles on a template by directed self-assembly technique
by: Varghese, B., et al.
Published: (2014)

Proton-beam writing of poly-methylmethacrylate buried channel waveguides
by: Sum, T.C., et al.
Published: (2014)

Fabrication of buried channel waveguides in photosensitive glass using proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Characterization of channel waveguides and tunable microlasers in SU8 doped with rhodamine B fabricated using proton beam writing
by: Venugopal Rao, S., et al.
Published: (2014)

Fabrication of PMMA micro- and nanofluidic channels by proton beam writing: Electrokinetic and morphological characterization
by: Mahabadi, K.A., et al.
Published: (2014)

Proton beam writing: A tool for high-aspect ratio mask production
by: Van Kan, J.A., et al.
Published: (2014)

Figures of merit for focusing mega-electron-volt ion beams in biomedical imaging and proton beam writing
by: Ren, M., et al.
Published: (2014)

Proton beam writing of low-loss polymer optical waveguides
by: Sum, T.C., et al.
Published: (2014)

Continuous wave Nd:YAG channel waveguide laser produced by focused proton beam writing
by: Yao, Y., et al.
Published: (2014)

Erbium doped waveguide amplifiers fabricated using focused proton beam irradiation
by: Liu, K., et al.
Published: (2014)

A Monte Carlo study of the extent of proximity effects in e-beam and p-beam writing of PMMA
by: Udalagama, C.N.B., et al.
Published: (2014)

Proton beam writing nanoprobe facility design and first test results
by: Van Kan, J.A., et al.
Published: (2014)

Development of elastomeric lab-on-a-chip devices through Proton Beam Writing (PBW) based fabrication strategies
by: Wang, L.P., et al.
Published: (2014)

An automatic beam focusing system for MeV protons
by: Udalagama, C.N.B., et al.
Published: (2014)

Manipulation and assembly of CuxS dendrites using optical tweezers
by: Cheong, F.C., et al.
Published: (2014)

Proton beam writing of erbium-doped waveguide amplifiers
by: Sum, T.C., et al.
Published: (2014)

New resists for proton beam writing
by: van Kan, J.A., et al.
Published: (2014)

Rapid prototyping of micro/nano poly (methyl methacrylate) fluidic systems using proton beam writing
by: Shao, P.G., et al.
Published: (2014)