Direct removal of SU-8 using focused laser writing

10.1007/s00339-006-3846-z

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Bibliographic Details
Main Authors:	Cheong, F.C., Varghese, B., Sindhu, S., Liu, C.M., Valiyaveettil, S., Bettiol, A.A., Van Kan, J.A., Watt, F., Chin, W.S., Lim, C.T., Sow, C.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51376
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51376
record_format	dspace
spelling	sg-nus-scholar.10635-513762023-10-26T08:50:49Z Direct removal of SU-8 using focused laser writing Cheong, F.C. Varghese, B. Sindhu, S. Liu, C.M. Valiyaveettil, S. Bettiol, A.A. Van Kan, J.A. Watt, F. Chin, W.S. Lim, C.T. Sow, C.H. PHYSICS NUS NANOSCIENCE & NANOTECH INITIATIVE CHEMISTRY MECHANICAL ENGINEERING SINGAPORE-MIT ALLIANCE 10.1007/s00339-006-3846-z Applied Physics A: Materials Science and Processing 87 1 71-76 APAMF 2014-04-24T09:32:28Z 2014-04-24T09:32:28Z 2007-04 Article Cheong, F.C., Varghese, B., Sindhu, S., Liu, C.M., Valiyaveettil, S., Bettiol, A.A., Van Kan, J.A., Watt, F., Chin, W.S., Lim, C.T., Sow, C.H. (2007-04). Direct removal of SU-8 using focused laser writing. Applied Physics A: Materials Science and Processing 87 (1) : 71-76. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-006-3846-z 09478396 http://scholarbank.nus.edu.sg/handle/10635/51376 000244292300013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00339-006-3846-z
author2	PHYSICS
author_facet	PHYSICS Cheong, F.C. Varghese, B. Sindhu, S. Liu, C.M. Valiyaveettil, S. Bettiol, A.A. Van Kan, J.A. Watt, F. Chin, W.S. Lim, C.T. Sow, C.H.
format	Article
author	Cheong, F.C. Varghese, B. Sindhu, S. Liu, C.M. Valiyaveettil, S. Bettiol, A.A. Van Kan, J.A. Watt, F. Chin, W.S. Lim, C.T. Sow, C.H.
spellingShingle	Cheong, F.C. Varghese, B. Sindhu, S. Liu, C.M. Valiyaveettil, S. Bettiol, A.A. Van Kan, J.A. Watt, F. Chin, W.S. Lim, C.T. Sow, C.H. Direct removal of SU-8 using focused laser writing
author_sort	Cheong, F.C.
title	Direct removal of SU-8 using focused laser writing
title_short	Direct removal of SU-8 using focused laser writing
title_full	Direct removal of SU-8 using focused laser writing
title_fullStr	Direct removal of SU-8 using focused laser writing
title_full_unstemmed	Direct removal of SU-8 using focused laser writing
title_sort	direct removal of su-8 using focused laser writing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51376
_version_	1781411684533927936

Direct removal of SU-8 using focused laser writing

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