Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers

Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers

10.1016/j.tsf.2005.09.023

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Bibliographic Details
Main Authors: Islam, M.M., Senthil Kumar, A., Balakumar, S., Lim, H.S., Rahman, M.
Other Authors: TROPICAL MARINE SCIENCE INSTITUTE
Format: Conference or Workshop Item
Published: 2014
Subjects:
IE assisted ELID
Self sharpening ability
Single crystal silicon wafers
Thinning performance
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51639
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Institution: National University of Singapore
Description
Summary:10.1016/j.tsf.2005.09.023

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