Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers

10.1016/j.tsf.2005.09.023

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Bibliographic Details
Main Authors:	Islam, M.M., Senthil Kumar, A., Balakumar, S., Lim, H.S., Rahman, M.
Other Authors:	TROPICAL MARINE SCIENCE INSTITUTE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	IE assisted ELID Self sharpening ability Single crystal silicon wafers Thinning performance
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51639
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Institution:	National University of Singapore

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record_format	dspace
spelling	sg-nus-scholar.10635-516392023-10-26T20:56:11Z Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M. TROPICAL MARINE SCIENCE INSTITUTE MECHANICAL ENGINEERING IE assisted ELID Self sharpening ability Single crystal silicon wafers Thinning performance 10.1016/j.tsf.2005.09.023 Thin Solid Films 504 1-2 15-19 THSFA 2014-04-24T10:17:30Z 2014-04-24T10:17:30Z 2006-05-10 Conference Paper Islam, M.M., Senthil Kumar, A., Balakumar, S., Lim, H.S., Rahman, M. (2006-05-10). Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers. Thin Solid Films 504 (1-2) : 15-19. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2005.09.023 00406090 http://scholarbank.nus.edu.sg/handle/10635/51639 000236486200005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	IE assisted ELID Self sharpening ability Single crystal silicon wafers Thinning performance
spellingShingle	IE assisted ELID Self sharpening ability Single crystal silicon wafers Thinning performance Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M. Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
description	10.1016/j.tsf.2005.09.023
author2	TROPICAL MARINE SCIENCE INSTITUTE
author_facet	TROPICAL MARINE SCIENCE INSTITUTE Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M.
format	Conference or Workshop Item
author	Islam, M.M. Senthil Kumar, A. Balakumar, S. Lim, H.S. Rahman, M.
author_sort	Islam, M.M.
title	Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
title_short	Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
title_full	Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
title_fullStr	Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
title_full_unstemmed	Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
title_sort	performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51639
_version_	1781411715067412480

Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers

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