Performance evaluation of a newly developed electrolytic system for stable thinning of silicon wafers

• Main Authors: Islam, M.M., Senthil Kumar, A., Balakumar, S., Lim, H.S., Rahman, M.
• Other Authors: TROPICAL MARINE SCIENCE INSTITUTE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: IE assisted ELID; Self sharpening ability; Single crystal silicon wafers; Thinning performance
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/51639
• Institution: National University of Singapore

10.1016/j.tsf.2005.09.023