Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy

10.1063/1.1728305

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Bibliographic Details
Main Authors:	Xie, X.N., Chung, H.J., Sow, C.H., Wee, A.T.S.
Other Authors:	NUS NANOSCIENCE & NANOTECH INITIATIVE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/53052
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-530522023-08-06T21:38:37Z Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S. NUS NANOSCIENCE & NANOTECH INITIATIVE PHYSICS 10.1063/1.1728305 Applied Physics Letters 84 24 4914-4916 APPLA 2014-05-19T02:53:37Z 2014-05-19T02:53:37Z 2004-06-14 Article Xie, X.N., Chung, H.J., Sow, C.H., Wee, A.T.S. (2004-06-14). Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy. Applied Physics Letters 84 (24) : 4914-4916. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1728305 00036951 http://scholarbank.nus.edu.sg/handle/10635/53052 000221793600026 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1728305
author2	NUS NANOSCIENCE & NANOTECH INITIATIVE
author_facet	NUS NANOSCIENCE & NANOTECH INITIATIVE Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S.
format	Article
author	Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S.
spellingShingle	Xie, X.N. Chung, H.J. Sow, C.H. Wee, A.T.S. Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy
author_sort	Xie, X.N.
title	Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy
title_short	Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy
title_full	Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy
title_fullStr	Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy
title_full_unstemmed	Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy
title_sort	native oxide decomposition and local oxidation of 6h-sic (0001) surface by atomic force microscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/53052
_version_	1773542660580048896

Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy

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