Demagnification-by-bias in proximity X-ray lithography
Proceedings of SPIE - The International Society for Optical Engineering
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2014
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sg-nus-scholar.10635-532842015-01-16T23:33:38Z Demagnification-by-bias in proximity X-ray lithography Ren, Kong Jong Leonard, Quinn Vladimirsky, Yuli Bourdillon, Antony SINGAPORE SYNCHROTRON LIGHT SOURCE MATERIALS SCIENCE Proceedings of SPIE - The International Society for Optical Engineering 3997 721-728 PSISD 2014-05-19T02:56:37Z 2014-05-19T02:56:37Z 2000 Conference Paper Ren, Kong Jong,Leonard, Quinn,Vladimirsky, Yuli,Bourdillon, Antony (2000). Demagnification-by-bias in proximity X-ray lithography. Proceedings of SPIE - The International Society for Optical Engineering 3997 : 721-728. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/53284 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Proceedings of SPIE - The International Society for Optical Engineering |
| author2 |
SINGAPORE SYNCHROTRON LIGHT SOURCE |
| author_facet |
SINGAPORE SYNCHROTRON LIGHT SOURCE Ren, Kong Jong Leonard, Quinn Vladimirsky, Yuli Bourdillon, Antony |
| format |
Conference or Workshop Item |
| author |
Ren, Kong Jong Leonard, Quinn Vladimirsky, Yuli Bourdillon, Antony |
| spellingShingle |
Ren, Kong Jong Leonard, Quinn Vladimirsky, Yuli Bourdillon, Antony Demagnification-by-bias in proximity X-ray lithography |
| author_sort |
Ren, Kong Jong |
| title |
Demagnification-by-bias in proximity X-ray lithography |
| title_short |
Demagnification-by-bias in proximity X-ray lithography |
| title_full |
Demagnification-by-bias in proximity X-ray lithography |
| title_fullStr |
Demagnification-by-bias in proximity X-ray lithography |
| title_full_unstemmed |
Demagnification-by-bias in proximity X-ray lithography |
| title_sort |
demagnification-by-bias in proximity x-ray lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/53284 |
| _version_ |
1681084132897062912 |