Demagnification-by-bias in proximity X-ray lithography
Proceedings of SPIE - The International Society for Optical Engineering
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Main Authors: | Ren, Kong Jong, Leonard, Quinn, Vladimirsky, Yuli, Bourdillon, Antony |
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Other Authors: | SINGAPORE SYNCHROTRON LIGHT SOURCE |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/53284 |
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Institution: | National University of Singapore |
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