Automatic integrated circuit die positioning in the scanning electron microscope
Scanning
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55169 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-55169 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-551692015-02-27T15:57:18Z Automatic integrated circuit die positioning in the scanning electron microscope Tan, H.W. Phang, J.C.H. Thong, J.T.L. ELECTRICAL & COMPUTER ENGINEERING Automation Die positioning Registration Scanning electron microscopy Template matching Scanning 24 2 86-91 SCNND 2014-06-17T02:39:58Z 2014-06-17T02:39:58Z 2002 Article Tan, H.W.,Phang, J.C.H.,Thong, J.T.L. (2002). Automatic integrated circuit die positioning in the scanning electron microscope. Scanning 24 (2) : 86-91. ScholarBank@NUS Repository. 01610457 http://scholarbank.nus.edu.sg/handle/10635/55169 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| topic |
Automation Die positioning Registration Scanning electron microscopy Template matching |
| spellingShingle |
Automation Die positioning Registration Scanning electron microscopy Template matching Tan, H.W. Phang, J.C.H. Thong, J.T.L. Automatic integrated circuit die positioning in the scanning electron microscope |
| description |
Scanning |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, H.W. Phang, J.C.H. Thong, J.T.L. |
| format |
Article |
| author |
Tan, H.W. Phang, J.C.H. Thong, J.T.L. |
| author_sort |
Tan, H.W. |
| title |
Automatic integrated circuit die positioning in the scanning electron microscope |
| title_short |
Automatic integrated circuit die positioning in the scanning electron microscope |
| title_full |
Automatic integrated circuit die positioning in the scanning electron microscope |
| title_fullStr |
Automatic integrated circuit die positioning in the scanning electron microscope |
| title_full_unstemmed |
Automatic integrated circuit die positioning in the scanning electron microscope |
| title_sort |
automatic integrated circuit die positioning in the scanning electron microscope |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55169 |
| _version_ |
1681084449926676480 |