Automatic integrated circuit die positioning in the scanning electron microscope

Automatic integrated circuit die positioning in the scanning electron microscope

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Bibliographic Details
Main Authors: Tan, H.W., Phang, J.C.H., Thong, J.T.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Automation
Die positioning
Registration
Scanning electron microscopy
Template matching
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55169
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/55169

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