Control of photoresist film thickness: Iterative feedback tuning approach

10.1016/j.compchemeng.2005.10.004

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Bibliographic Details
Main Authors:	Tay, A., Khuen Ho, W., Deng, J., Keng Lok, B.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Iterative feedback tuning Microlithography Photoresist processing Self-tuning control Semiconductor manufacturing Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55413
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55413
record_format	dspace
spelling	sg-nus-scholar.10635-554132023-10-25T07:24:12Z Control of photoresist film thickness: Iterative feedback tuning approach Tay, A. Khuen Ho, W. Deng, J. Keng Lok, B. ELECTRICAL & COMPUTER ENGINEERING Iterative feedback tuning Microlithography Photoresist processing Self-tuning control Semiconductor manufacturing Temperature control 10.1016/j.compchemeng.2005.10.004 Computers and Chemical Engineering 30 3 572-579 CCEND 2014-06-17T02:42:47Z 2014-06-17T02:42:47Z 2006-01-15 Article Tay, A., Khuen Ho, W., Deng, J., Keng Lok, B. (2006-01-15). Control of photoresist film thickness: Iterative feedback tuning approach. Computers and Chemical Engineering 30 (3) : 572-579. ScholarBank@NUS Repository. https://doi.org/10.1016/j.compchemeng.2005.10.004 00981354 http://scholarbank.nus.edu.sg/handle/10635/55413 000235388800015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Iterative feedback tuning Microlithography Photoresist processing Self-tuning control Semiconductor manufacturing Temperature control
spellingShingle	Iterative feedback tuning Microlithography Photoresist processing Self-tuning control Semiconductor manufacturing Temperature control Tay, A. Khuen Ho, W. Deng, J. Keng Lok, B. Control of photoresist film thickness: Iterative feedback tuning approach
description	10.1016/j.compchemeng.2005.10.004
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Khuen Ho, W. Deng, J. Keng Lok, B.
format	Article
author	Tay, A. Khuen Ho, W. Deng, J. Keng Lok, B.
author_sort	Tay, A.
title	Control of photoresist film thickness: Iterative feedback tuning approach
title_short	Control of photoresist film thickness: Iterative feedback tuning approach
title_full	Control of photoresist film thickness: Iterative feedback tuning approach
title_fullStr	Control of photoresist film thickness: Iterative feedback tuning approach
title_full_unstemmed	Control of photoresist film thickness: Iterative feedback tuning approach
title_sort	control of photoresist film thickness: iterative feedback tuning approach
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55413
_version_	1781412124813164544

Control of photoresist film thickness: Iterative feedback tuning approach

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