Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals
10.1116/1.1362679
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sg-nus-scholar.10635-556372024-11-11T13:17:18Z Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals Han, G.C. Luo, P. Li, K.B. Wu, Y.H. ELECTRICAL & COMPUTER ENGINEERING PHYSICS 10.1116/1.1362679 Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 3 793-797 JVTAD 2014-06-17T02:45:24Z 2014-06-17T02:45:24Z 2001-05 Article Han, G.C., Luo, P., Li, K.B., Wu, Y.H. (2001-05). Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 (3) : 793-797. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1362679 07342101 http://scholarbank.nus.edu.sg/handle/10635/55637 000168922300012 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.1362679 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Han, G.C. Luo, P. Li, K.B. Wu, Y.H. |
| format |
Article |
| author |
Han, G.C. Luo, P. Li, K.B. Wu, Y.H. |
| spellingShingle |
Han, G.C. Luo, P. Li, K.B. Wu, Y.H. Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| author_sort |
Han, G.C. |
| title |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| title_short |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| title_full |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| title_fullStr |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| title_full_unstemmed |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| title_sort |
diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55637 |
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