Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals
10.1116/1.1362679
Saved in:
Main Authors: | , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/55637 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-55637 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-556372023-10-29T22:46:04Z Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals Han, G.C. Luo, P. Li, K.B. Wu, Y.H. PHYSICS ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1362679 Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 3 793-797 JVTAD 2014-06-17T02:45:24Z 2014-06-17T02:45:24Z 2001-05 Article Han, G.C., Luo, P., Li, K.B., Wu, Y.H. (2001-05). Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films 19 (3) : 793-797. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1362679 07342101 http://scholarbank.nus.edu.sg/handle/10635/55637 000168922300012 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
10.1116/1.1362679 |
author2 |
PHYSICS |
author_facet |
PHYSICS Han, G.C. Luo, P. Li, K.B. Wu, Y.H. |
format |
Article |
author |
Han, G.C. Luo, P. Li, K.B. Wu, Y.H. |
spellingShingle |
Han, G.C. Luo, P. Li, K.B. Wu, Y.H. Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
author_sort |
Han, G.C. |
title |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
title_short |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
title_full |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
title_fullStr |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
title_full_unstemmed |
Diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
title_sort |
diffusion and oxidation of plasma-enhanced chemical-vapor-deposition silicon nitride and underlying metals |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/55637 |
_version_ |
1781412164085481472 |