Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric

10.1109/TED.2005.856189

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Bibliographic Details
Main Authors:	Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Conduction mechanism Iow-k Porosity
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55756
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55756
record_format	dspace
spelling	sg-nus-scholar.10635-557562024-11-12T22:38:20Z Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING Conduction mechanism Iow-k Porosity 10.1109/TED.2005.856189 IEEE Transactions on Electron Devices 52 10 2333-2339 IETDA 2014-06-17T02:46:46Z 2014-06-17T02:46:46Z 2005-10 Article Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A. (2005-10). Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric. IEEE Transactions on Electron Devices 52 (10) : 2333-2339. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2005.856189 00189383 http://scholarbank.nus.edu.sg/handle/10635/55756 000232193000030 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Conduction mechanism Iow-k Porosity
spellingShingle	Conduction mechanism Iow-k Porosity Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
description	10.1109/TED.2005.856189
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A.
format	Article
author	Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A.
author_sort	Yiang, K.Y.
title	Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
title_short	Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
title_full	Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
title_fullStr	Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
title_full_unstemmed	Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
title_sort	effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55756
_version_	1821194175280840704

Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric

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