Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode

10.1063/1.2363144

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Main Authors: Yu, X., Zhu, C., Yu, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55767
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-557672023-10-25T22:59:25Z Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode Yu, X. Zhu, C. Yu, M. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2363144 Applied Physics Letters 89 16 - APPLA 2014-06-17T02:46:53Z 2014-06-17T02:46:53Z 2006 Article Yu, X., Zhu, C., Yu, M. (2006). Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode. Applied Physics Letters 89 (16) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2363144 00036951 http://scholarbank.nus.edu.sg/handle/10635/55767 000241405200115 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2363144
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yu, X.
Zhu, C.
Yu, M.
format Article
author Yu, X.
Zhu, C.
Yu, M.
spellingShingle Yu, X.
Zhu, C.
Yu, M.
Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
author_sort Yu, X.
title Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
title_short Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
title_full Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
title_fullStr Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
title_full_unstemmed Effective suppression of Fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
title_sort effective suppression of fermi level pinning in polycrystalline-silicon/ high- k gate stack by using polycrystalline-silicon-germanium gate electrode
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/55767
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