Exposure of defects in GaN by plasma etching

10.1007/s00339-003-2372-5

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Main Authors:	Choi, H.W., Liu, C., Cheong, M.G., Zhang, J., Chua, S.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55970
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-559702023-11-01T07:05:01Z Exposure of defects in GaN by plasma etching Choi, H.W. Liu, C. Cheong, M.G. Zhang, J. Chua, S.J. ELECTRICAL & COMPUTER ENGINEERING 10.1007/s00339-003-2372-5 Applied Physics A: Materials Science and Processing 80 2 405-407 APAMF 2014-06-17T02:49:13Z 2014-06-17T02:49:13Z 2005-02 Article Choi, H.W., Liu, C., Cheong, M.G., Zhang, J., Chua, S.J. (2005-02). Exposure of defects in GaN by plasma etching. Applied Physics A: Materials Science and Processing 80 (2) : 405-407. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-003-2372-5 09478396 http://scholarbank.nus.edu.sg/handle/10635/55970 000225864600036 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00339-003-2372-5
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Choi, H.W. Liu, C. Cheong, M.G. Zhang, J. Chua, S.J.
format	Article
author	Choi, H.W. Liu, C. Cheong, M.G. Zhang, J. Chua, S.J.
spellingShingle	Choi, H.W. Liu, C. Cheong, M.G. Zhang, J. Chua, S.J. Exposure of defects in GaN by plasma etching
author_sort	Choi, H.W.
title	Exposure of defects in GaN by plasma etching
title_short	Exposure of defects in GaN by plasma etching
title_full	Exposure of defects in GaN by plasma etching
title_fullStr	Exposure of defects in GaN by plasma etching
title_full_unstemmed	Exposure of defects in GaN by plasma etching
title_sort	exposure of defects in gan by plasma etching
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55970
_version_	1781781088489701376

Exposure of defects in GaN by plasma etching

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