In situ measurement of wafer temperature using two sensors with different dynamical properties

10.1088/0957-0233/17/11/014

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Bibliographic Details
Main Authors:	Tan, W.W., Tang, J.C., Loh, A.P., Tay, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	In situ temperature measurement Post-exposure bake Prediction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56297
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56297
record_format	dspace
spelling	sg-nus-scholar.10635-562972023-10-25T23:12:52Z In situ measurement of wafer temperature using two sensors with different dynamical properties Tan, W.W. Tang, J.C. Loh, A.P. Tay, A. ELECTRICAL & COMPUTER ENGINEERING In situ temperature measurement Post-exposure bake Prediction 10.1088/0957-0233/17/11/014 Measurement Science and Technology 17 11 2957-2963 MSTCE 2014-06-17T02:52:59Z 2014-06-17T02:52:59Z 2006-11-01 Article Tan, W.W., Tang, J.C., Loh, A.P., Tay, A. (2006-11-01). In situ measurement of wafer temperature using two sensors with different dynamical properties. Measurement Science and Technology 17 (11) : 2957-2963. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/17/11/014 09570233 http://scholarbank.nus.edu.sg/handle/10635/56297 000241991300015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	In situ temperature measurement Post-exposure bake Prediction
spellingShingle	In situ temperature measurement Post-exposure bake Prediction Tan, W.W. Tang, J.C. Loh, A.P. Tay, A. In situ measurement of wafer temperature using two sensors with different dynamical properties
description	10.1088/0957-0233/17/11/014
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, W.W. Tang, J.C. Loh, A.P. Tay, A.
format	Article
author	Tan, W.W. Tang, J.C. Loh, A.P. Tay, A.
author_sort	Tan, W.W.
title	In situ measurement of wafer temperature using two sensors with different dynamical properties
title_short	In situ measurement of wafer temperature using two sensors with different dynamical properties
title_full	In situ measurement of wafer temperature using two sensors with different dynamical properties
title_fullStr	In situ measurement of wafer temperature using two sensors with different dynamical properties
title_full_unstemmed	In situ measurement of wafer temperature using two sensors with different dynamical properties
title_sort	in situ measurement of wafer temperature using two sensors with different dynamical properties
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56297
_version_	1781781147912503296

In situ measurement of wafer temperature using two sensors with different dynamical properties

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