Investigation of silicon-germanium fins fabricated using germanium condensation on vertical compliant structures

Investigation of silicon-germanium fins fabricated using germanium condensation on vertical compliant structures

10.1063/1.2151257

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Bibliographic Details
Main Authors: Liow, T.-Y., Tan, K.-M., Yeo, Y.-C., Agarwal, A., Du, A., Tung, C.-H., Balasubramanian, N.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56403
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Institution: National University of Singapore
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Summary:10.1063/1.2151257

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