Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF

10.1116/1.2731339

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Main Authors:	Hwang, W.S., Cho, B.-J., Chan, D.S.H., Yoo, W.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56525
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-565252024-11-14T01:24:57Z Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF Hwang, W.S. Cho, B.-J. Chan, D.S.H. Yoo, W.J. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2731339 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 25 4 1056-1061 JVTAD 2014-06-17T02:55:36Z 2014-06-17T02:55:36Z 2007 Article Hwang, W.S., Cho, B.-J., Chan, D.S.H., Yoo, W.J. (2007). Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 25 (4) : 1056-1061. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2731339 07342101 http://scholarbank.nus.edu.sg/handle/10635/56525 000248491700070 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.2731339
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Hwang, W.S. Cho, B.-J. Chan, D.S.H. Yoo, W.J.
format	Article
author	Hwang, W.S. Cho, B.-J. Chan, D.S.H. Yoo, W.J.
spellingShingle	Hwang, W.S. Cho, B.-J. Chan, D.S.H. Yoo, W.J. Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF
author_sort	Hwang, W.S.
title	Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF
title_short	Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF
title_full	Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF
title_fullStr	Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF
title_full_unstemmed	Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF
title_sort	low energy n2 ion bombardment for removal of (hf o2) x (sion)1-x in dilute hf
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56525
_version_	1821206063082373120

Low energy N2 ion bombardment for removal of (Hf O2) x (SiON)1-x in dilute HF

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