Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice

Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice

10.1109/JMEMS.2011.2174416

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Bibliographic Details
Main Authors: Wang, N., Tsai, J.M.-L., Hsiao, F.-L., Soon, B.W., Kwong, D.-L., Palaniapan, M., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
CMOS compatible
microelectromechanical systems (MEMS)
phononic crystal (PnC)
resonator
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56622
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Institution: National University of Singapore
Description
Summary:10.1109/JMEMS.2011.2174416

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