Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice

• Main Authors: Wang, N., Tsai, J.M.-L., Hsiao, F.-L., Soon, B.W., Kwong, D.-L., Palaniapan, M., Lee, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: CMOS compatible; microelectromechanical systems (MEMS); phononic crystal (PnC); resonator
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/56622
• Institution: National University of Singapore

10.1109/JMEMS.2011.2174416