Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice
10.1109/JMEMS.2011.2174416
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2014
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sg-nus-scholar.10635-566222023-10-30T22:04:00Z Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice Wang, N. Tsai, J.M.-L. Hsiao, F.-L. Soon, B.W. Kwong, D.-L. Palaniapan, M. Lee, C. ELECTRICAL & COMPUTER ENGINEERING CMOS compatible microelectromechanical systems (MEMS) phononic crystal (PnC) resonator 10.1109/JMEMS.2011.2174416 Journal of Microelectromechanical Systems 21 4 801-810 JMIYE 2014-06-17T02:56:41Z 2014-06-17T02:56:41Z 2012 Article Wang, N., Tsai, J.M.-L., Hsiao, F.-L., Soon, B.W., Kwong, D.-L., Palaniapan, M., Lee, C. (2012). Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice. Journal of Microelectromechanical Systems 21 (4) : 801-810. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2011.2174416 10577157 http://scholarbank.nus.edu.sg/handle/10635/56622 000307124200009 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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| topic |
CMOS compatible microelectromechanical systems (MEMS) phononic crystal (PnC) resonator |
| spellingShingle |
CMOS compatible microelectromechanical systems (MEMS) phononic crystal (PnC) resonator Wang, N. Tsai, J.M.-L. Hsiao, F.-L. Soon, B.W. Kwong, D.-L. Palaniapan, M. Lee, C. Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| description |
10.1109/JMEMS.2011.2174416 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Wang, N. Tsai, J.M.-L. Hsiao, F.-L. Soon, B.W. Kwong, D.-L. Palaniapan, M. Lee, C. |
| format |
Article |
| author |
Wang, N. Tsai, J.M.-L. Hsiao, F.-L. Soon, B.W. Kwong, D.-L. Palaniapan, M. Lee, C. |
| author_sort |
Wang, N. |
| title |
Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| title_short |
Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| title_full |
Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| title_fullStr |
Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| title_full_unstemmed |
Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| title_sort |
micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56622 |
| _version_ |
1781781218810920960 |