Modeling and real-time control of multizone thermal processing system for photoresist processing

Modeling and real-time control of multizone thermal processing system for photoresist processing

10.1021/ie3017434

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Bibliographic Details
Main Authors: Tay, A., Chua, H.T., Yuheng, W., Geng, Y., Khuen, H.W.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56668
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/56668

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