Modeling and real-time control of multizone thermal processing system for photoresist processing
10.1021/ie3017434
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sg-nus-scholar.10635-566682023-10-26T07:16:26Z Modeling and real-time control of multizone thermal processing system for photoresist processing Tay, A. Chua, H.T. Yuheng, W. Geng, Y. Khuen, H.W. ELECTRICAL & COMPUTER ENGINEERING 10.1021/ie3017434 Industrial and Engineering Chemistry Research 52 13 4805-4814 IECRE 2014-06-17T02:57:13Z 2014-06-17T02:57:13Z 2013-04-03 Article Tay, A., Chua, H.T., Yuheng, W., Geng, Y., Khuen, H.W. (2013-04-03). Modeling and real-time control of multizone thermal processing system for photoresist processing. Industrial and Engineering Chemistry Research 52 (13) : 4805-4814. ScholarBank@NUS Repository. https://doi.org/10.1021/ie3017434 08885885 http://scholarbank.nus.edu.sg/handle/10635/56668 000317259000015 Scopus |
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| description |
10.1021/ie3017434 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Chua, H.T. Yuheng, W. Geng, Y. Khuen, H.W. |
| format |
Article |
| author |
Tay, A. Chua, H.T. Yuheng, W. Geng, Y. Khuen, H.W. |
| spellingShingle |
Tay, A. Chua, H.T. Yuheng, W. Geng, Y. Khuen, H.W. Modeling and real-time control of multizone thermal processing system for photoresist processing |
| author_sort |
Tay, A. |
| title |
Modeling and real-time control of multizone thermal processing system for photoresist processing |
| title_short |
Modeling and real-time control of multizone thermal processing system for photoresist processing |
| title_full |
Modeling and real-time control of multizone thermal processing system for photoresist processing |
| title_fullStr |
Modeling and real-time control of multizone thermal processing system for photoresist processing |
| title_full_unstemmed |
Modeling and real-time control of multizone thermal processing system for photoresist processing |
| title_sort |
modeling and real-time control of multizone thermal processing system for photoresist processing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/56668 |
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1781781230161756160 |