Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection

10.1116/1.2804611

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Bibliographic Details
Main Authors:	Pickard, D.S., Kenney, C., Tanimoto, S., Crane, T., Groves, T., Pease, R.F.W.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56693
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56693
record_format	dspace
spelling	sg-nus-scholar.10635-566932024-11-14T20:33:27Z Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection Pickard, D.S. Kenney, C. Tanimoto, S. Crane, T. Groves, T. Pease, R.F.W. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2804611 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 6 2277-2283 JVTBD 2014-06-17T02:57:33Z 2014-06-17T02:57:33Z 2007 Article Pickard, D.S., Kenney, C., Tanimoto, S., Crane, T., Groves, T., Pease, R.F.W. (2007). Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 (6) : 2277-2283. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2804611 10711023 http://scholarbank.nus.edu.sg/handle/10635/56693 000251611900102 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.2804611
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Pickard, D.S. Kenney, C. Tanimoto, S. Crane, T. Groves, T. Pease, R.F.W.
format	Article
author	Pickard, D.S. Kenney, C. Tanimoto, S. Crane, T. Groves, T. Pease, R.F.W.
spellingShingle	Pickard, D.S. Kenney, C. Tanimoto, S. Crane, T. Groves, T. Pease, R.F.W. Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
author_sort	Pickard, D.S.
title	Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
title_short	Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
title_full	Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
title_fullStr	Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
title_full_unstemmed	Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
title_sort	monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56693
_version_	1821217921119027200

Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection

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