Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection

Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection

10.1116/1.2804611

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Bibliographic Details
Main Authors: Pickard, D.S., Kenney, C., Tanimoto, S., Crane, T., Groves, T., Pease, R.F.W.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56693
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Institution: National University of Singapore
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