New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive

10.1109/TIE.2003.819567

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Bibliographic Details
Main Authors:	Zhao, T., Liang, Y.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Microactuation Microelectromechanical systems (MEMS) comb drive
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56790
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56790
record_format	dspace
spelling	sg-nus-scholar.10635-567902023-10-31T07:48:51Z New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive Zhao, T. Liang, Y.C. ELECTRICAL & COMPUTER ENGINEERING Microactuation Microelectromechanical systems (MEMS) comb drive 10.1109/TIE.2003.819567 IEEE Transactions on Industrial Electronics 50 6 1337-1339 ITIED 2014-06-17T02:58:38Z 2014-06-17T02:58:38Z 2003-12 Article Zhao, T., Liang, Y.C. (2003-12). New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive. IEEE Transactions on Industrial Electronics 50 (6) : 1337-1339. ScholarBank@NUS Repository. https://doi.org/10.1109/TIE.2003.819567 02780046 http://scholarbank.nus.edu.sg/handle/10635/56790 000187735900032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Microactuation Microelectromechanical systems (MEMS) comb drive
spellingShingle	Microactuation Microelectromechanical systems (MEMS) comb drive Zhao, T. Liang, Y.C. New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
description	10.1109/TIE.2003.819567
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhao, T. Liang, Y.C.
format	Article
author	Zhao, T. Liang, Y.C.
author_sort	Zhao, T.
title	New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
title_short	New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
title_full	New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
title_fullStr	New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
title_full_unstemmed	New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive
title_sort	new actuation method for push-pull electrostatic mems comb drive
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56790
_version_	1781781281021886464

New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive

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