New Actuation Method for Push-Pull Electrostatic MEMS Comb Drive

10.1109/TIE.2003.819567

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Bibliographic Details
Main Authors:	Zhao, T., Liang, Y.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Microactuation Microelectromechanical systems (MEMS) comb drive
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56790
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Institution:	National University of Singapore

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