Optimal feed-forward control for multizone baking in microlithography

10.1021/ie061011p

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Main Authors:	Ho, W.K., Tay, A., Chen, M., Kiew, C.M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56934
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-569342023-10-30T22:12:01Z Optimal feed-forward control for multizone baking in microlithography Ho, W.K. Tay, A. Chen, M. Kiew, C.M. ELECTRICAL & COMPUTER ENGINEERING 10.1021/ie061011p Industrial and Engineering Chemistry Research 46 11 3623-3628 IECRE 2014-06-17T03:00:19Z 2014-06-17T03:00:19Z 2007-05-23 Article Ho, W.K., Tay, A., Chen, M., Kiew, C.M. (2007-05-23). Optimal feed-forward control for multizone baking in microlithography. Industrial and Engineering Chemistry Research 46 (11) : 3623-3628. ScholarBank@NUS Repository. https://doi.org/10.1021/ie061011p 08885885 http://scholarbank.nus.edu.sg/handle/10635/56934 000246485900018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1021/ie061011p
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Tay, A. Chen, M. Kiew, C.M.
format	Article
author	Ho, W.K. Tay, A. Chen, M. Kiew, C.M.
spellingShingle	Ho, W.K. Tay, A. Chen, M. Kiew, C.M. Optimal feed-forward control for multizone baking in microlithography
author_sort	Ho, W.K.
title	Optimal feed-forward control for multizone baking in microlithography
title_short	Optimal feed-forward control for multizone baking in microlithography
title_full	Optimal feed-forward control for multizone baking in microlithography
title_fullStr	Optimal feed-forward control for multizone baking in microlithography
title_full_unstemmed	Optimal feed-forward control for multizone baking in microlithography
title_sort	optimal feed-forward control for multizone baking in microlithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56934
_version_	1781781311299518464

Optimal feed-forward control for multizone baking in microlithography

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