Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning

Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning

10.2961/jlmn.2010.03.0010

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Bibliographic Details
Main Authors: Huang, Z., Lin, Q.Y., Hong, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Lithography
Microlens array
Multi-beam
Parallel processing
Periodic structures
Phase shift mask
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57048
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Institution: National University of Singapore
id sg-nus-scholar.10635-57048
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spelling sg-nus-scholar.10635-570482023-10-31T07:22:27Z Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning Huang, Z. Lin, Q.Y. Hong, M. ELECTRICAL & COMPUTER ENGINEERING Lithography Microlens array Multi-beam Parallel processing Periodic structures Phase shift mask 10.2961/jlmn.2010.03.0010 Journal of Laser Micro Nanoengineering 5 3 233-237 2014-06-17T03:01:39Z 2014-06-17T03:01:39Z 2010-12 Article Huang, Z., Lin, Q.Y., Hong, M. (2010-12). Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning. Journal of Laser Micro Nanoengineering 5 (3) : 233-237. ScholarBank@NUS Repository. https://doi.org/10.2961/jlmn.2010.03.0010 18800688 http://scholarbank.nus.edu.sg/handle/10635/57048 000285630600010 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Lithography
Microlens array
Multi-beam
Parallel processing
Periodic structures
Phase shift mask
spellingShingle Lithography
Microlens array
Multi-beam
Parallel processing
Periodic structures
Phase shift mask
Huang, Z.
Lin, Q.Y.
Hong, M.
Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
description 10.2961/jlmn.2010.03.0010
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Huang, Z.
Lin, Q.Y.
Hong, M.
format Article
author Huang, Z.
Lin, Q.Y.
Hong, M.
author_sort Huang, Z.
title Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
title_short Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
title_full Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
title_fullStr Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
title_full_unstemmed Phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
title_sort phase shift mask fabrication by laser microlens array lithography for periodic nanostructures patterning
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57048
_version_ 1781781336324833280

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